ISSN:2321-6212
I M Shmytko, O V Misochko and S K Brantov
Institute of Solid State Physics - RAS, Russia
Posters & Accepted Abstracts: Res. Rev. J Mat. Sci
Attempts have been made to develop a simple and fast technique of producing diamond-like films by chemical vapor
deposition (СVD) via methane pyrolysis at ~1270-1420 K using a simple reaction cell in the form of a capacitor. Under the
impact of electric field ~ 10-2 V/�?¼m the �?arbon condensed onto single crystal silicon substrates placed between the capacitor
graphite plates. However, applying this technique we obtained instead of diamond-like films, pseudo-graphite films with
graphitization index of ��?0.44. The films were extremely brittle, easily ground in an agate mortar into nanopowder with grain
sizes of several tens of nanometers and demonstrated micro hardness comparable to that of diamond (~70-90 GPа). They
also exhibited a pronounced texture in the direction of the film normal coinciding with the graphite c-axis and consisted of
nanocrystallites with average size
E-mail:
shim@issp.ac.ru