ISSN:2321-6212
I M Shmytko, O V Misochko and S K Brantov
Institute of Solid State Physics - RAS, Russia
Posters & Accepted Abstracts: Res. Rev. J Mat. Sci
Attempts have been made to develop a simple and fast technique of producing diamond-like films by chemical vapor
deposition (СVD) via methane pyrolysis at ~1270-1420 K using a simple reaction cell in the form of a capacitor. Under the
impact of electric field ~ 10-2 V/?¼m the ?arbon condensed onto single crystal silicon substrates placed between the capacitor
graphite plates. However, applying this technique we obtained instead of diamond-like films, pseudo-graphite films with
graphitization index of â??0.44. The films were extremely brittle, easily ground in an agate mortar into nanopowder with grain
sizes of several tens of nanometers and demonstrated micro hardness comparable to that of diamond (~70-90 GPа). They
also exhibited a pronounced texture in the direction of the film normal coinciding with the graphite c-axis and consisted of
nanocrystallites with average size
E-mail:
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