materials-science-2017-posters-accepted-abstracts

8 / 48

Page 64
Notes:
conferenceseries .com
November 13-15, 2017 | Las Vegas, USA
14th International Conference and Exhibition on
Materials Science and Engineering
RRJOMS | Volume 5 | Issue 7 | November, 2017
Preparation of oxide semiconductors thin films for the transparent electrode by helicon-wave excited
plasma sputtering method
Takumi Namba and Shizutoshi Ando
Tokyo University of Science, Japan
Silicon (Si)-based solar cells have a market share of more than 90%, and are expanding in this market. However, high purity Si is
very expensive and would be the risks of short supply and price fluctuation. Recently, Cu )Se2(CIGS) based thin film solar
cells have been attracted as high conversion efficiency as a high efficiency thin film solar cell of the next generation and achieved the
highest conversion efficiency of 20% over. The top electrode material for CICS based solar cell is widely used ZnO:Al and is required
to be low resistivity (under 10-3 Ωcm) and optical transparency (larger than 80% in transmittance). Moreover, the preparation of
good crystallinity ZnO:Al thin films is expected for improvement of the conversion efficiency of CIGS based solar cells. In this
study, we tried to prepare ZnO:Al thin films with good crystallinity by helicon wave excited magnetron sputtering method and
aimed to establish conditions for preparation. ZnO:Al thin films prepared by this method were evaluated for crystallinity, optical
transmittance, and thickness by X-ray diffraction (XRD), recording spectrophotometer, and stylus surface profiler. Figure1 shows
(a) XRD patterns and (b) optical transmittance spectra of ZnO:Al thin films prepared at various the target bias voltages. RF power,
substrate temperature, and deposition time were 400W, 2000c, and 3 hours, respectively. ZnO:Al thin filmprepared at -300 V exhibited
the wurtzite structure (α-ZnO), optical absorption edge of 360 nm (3.37 eV) and good optical transparency.
Biography
Takumi Namba was received the Bachelar of Engineering degree in electrical engineering from Tokyo University of Science, Tokyo Japan, in 2016. He is now a master
course student of Graduate School of Engineering in Tokyo University of Science. His research interest iclude development of oxide compound thin film solar cells as the
earth eco-friendly next generation solar cells.
Takumi Namba et al., Res. Rev. J Mat. Sci. 2017, 5:7
DOI: 10.4172/2321-6212-C1-012