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Volume 5, Issue 6 (Suppl) J Mat. Sci.
ISSN: 2321-6212 Advanced Materials 2017
October 26-28, 2017
OCTOBER 26-28, 2017 OSAKA, JAPAN
13TH INTERNATIONAL CONFERENCE ON
Advanced Materials and Nanotechnology
Plasma polymer fluorocarbon thin films deposited by roll-to-roll sputtering
Sung Hyun Kim, Tae-Woon Kang, Mac Kim, Jae Heung Lee and Sang-Jin Lee
Korea Research Institute of Chemical Technology, Republic of Korea
C arbon nanotube/polytetrafluoroethylene composite polymer targets (abbreviated as composite target) are proposed for
use in the fabrication of plasma polymer fluorocarbon (abbreviated as PPFC) thin films using the mid-range frequency
sputtering process. Large-area PPFC thin films were fabricated on roll-type PET substrate (polyethylene terephthalate, width
700 mm, thickness 100 μm) by a pilot-scale roll-to-roll sputtering system. The PPFC thin films exhibit an amorphous phase
with a smooth surface and show a high water contact angle, optical transmittance and bendability. Mechanical property of
PPFC thin films were studied using nanoindentation method and analyzed using X-ray photoelectron spectroscopy and
Fourier transform infrared spectroscopy. As the carbon nanotube concentration in the composite target increases, a carbon
cross-linked structure was formed which enhanced the film hardness and the modulus of the PPFC thin films.
Biography
Sung Hyun Kim has completed his Master course of Nano Fusion Technology in 2015 from Pusan National University. He is a Ph.D. student at the Korea Research
Institute of Chemical Technology and Pusan National University.
Sung Hyun Kim et al., J Mat. Sci. 2017, 5:6
DOI: 10.4172/2321-6212-C1-009