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.com
Volume 5, Issue 6 (Suppl)
J Mat. Sci.
ISSN: 2321-6212
Advanced Materials 2017
October 26-28, 2017
OCTOBER 26-28, 2017 OSAKA, JAPAN
13
TH
INTERNATIONAL CONFERENCE ON
Advanced Materials and Nanotechnology
Effect of outgassing in polymer substrate for high performance conducting oxide thin films
Tae-Woon Kang, Sung Hyun Kim, Mac Kim, Jae Heung Lee and Sang-Jin Lee
Korea Research Institute of Chemical Technology, Republic of Korea
R
ecently, Roll-to-Roll (R2R) sputtering process have attracted much attention in deposition of Indium Tin Oxide (ITO)
thin films on polymer substrates for flexible optoelectronics due to their high flexibility, low cost. We found that polymer
substrate contained contaminative gases and moisture (H
2
O) both on the surface and within hard coating layer, and the
characteristics of ITO films are adversely affected by the contained gases. In this study, we report the importance of outgassing
process in the deposition of ITO thin films on hard-coated Polyethylene Terephthalate (PET) by pilot-scale R2R sputtering.
The optical and electrical properties of ITO films on PET films were improved by using an outgassing process. The outgassed
ITO film shows a low sheet resistance to ~ 100 ohm/sq. and high optical transmittance to ~ 90 %.
Biography
Tae-Woon Kang has completed his Master course of Professional Graduate School of Flexible and Printable Electronics in 2016 from Chonbuk National University,
South Korea. He currently works at Korea Research Institute of Chemical Technology.
twkang@krict.re.krTae-Woon Kang et al., J Mat. Sci. 2017, 5:6
DOI: 10.4172/2321-6212-C1-009