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Research & Reviews: Journal of Material Sciences | ISSN: 2321-6212 | Volulme 6
November 07-08, 2018 | Atlanta, USA
Materials Science and Engineering
15
th
International Conference and Exhibition on
Applied Crystallography
3
rd
International Conference on
&
Modelling and simulation sensors of mems based pressure for industrial applications
Vemireddy Hanumakoti
Lakireddy Bali Reddy College of Engineering, India
T
his paper presents investigations on improvement sensitivity of MEMS-based pressure sensor for various industrial and
environmental applications. It provides an overview of the design, modeling and simulation of MEMS pressure sensor. An
attempt has been made to achieve high sensitivity i.e. providing different structures for membrane (circular, square, rectangle)
with uniform surface area and thickness have been modeled and simulated for various loads ranging from 0.1 to 1MPa with
three different materials. From the analysis of simulation results, it has been observed that the pressure sensor with circular
membrane provided with aluminium material found to exhibit more deformation and high sensitivity of 28.2×10
-6
for 10µm
thickness and 45.6×10
-6
for 7µm thickness. The reasons for enhancement in the sensitivity discussed in detail as a function of
input load, geometry changes and materials addition. The software tool COMSOL Multiphysics version 4.2 is used to model the
proposed design of pressure sensor. These studies are highly useful to check and compute pressure in various environmental
conditions.
Biography
Vemireddy Hanumakoti graduated from Department of Electronics and Instrumentation Engineering at Lakireddy Bali Reddy Autonomous Engineering College.
She is working as a Technician in the Department of Electronics and Instrumentation Engineering in National MEMS Design Centre (NMDC) since five years. She
is involving and clarifying the doubts that are coming to NMDC for design and simulation by using software tool COMSOL Multiphysics. She is actively participating
in department organizing conferences, workshops and seminars related to NMDC.
hanumavemireddy@gmail.comVemireddy Hanumakoti, Res. Rev. J Mat. Sci. 2018, Volume 6
DOI: 10.4172/2321-6212-C8-036